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The DynamYX Datum and GT deliver high resolution, dynamic positioning of a wafer chuck or similar substrate in two orthogonal translation axes from a singleplane carriage.Newport Corporation is a leading global supplier of advancedtechnology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets., with acceleration of G (Y axis) and G (X axis).High efficiency linear motors minimize heat generation and apply drive forces through the center of the gravity of the stage resulting in superior longterm repeatability and dynamic performance. For added flexibility, a vertical Zaxis with tip/tilt function and a rotary axis for wafer offset correction can be added on the carriage beneath the wafer chuck. Other options are available for encoder and interferometer feedback, if required. The maximum velocity reaches .Business Development Manager, Walter Silvesky, notes.

"The allnew DynamYX Datum and GT feature Tilting pad journal bearings unique performance characteristics that are achieved in part due to the highly differentiated and proprietary construction using advanced ceramics (SiC) that yields lightweight moreand incredibly rigid stage structures with high natural frequencies and exceptional thermal stability. With a rated payload of kg, the new Hz natural frequency stage features high accuracy (encoder feedback) at nm ( sigma) and high repeatability at nm ( sigma), making it ideal for tasks that require a high performing positioning stage for mm wafers. They are perfectly suited to handle the larger travel ranges, payloads, and increased throughput requirements of nextgeneration mm tools.Newport Corporation Deere AvenueIrvine, CA Tel Fax.

This release was published on openPR."Newport will be showcasing the DynamYX Datum stage at SEMICON West at Moscone Center (San Francisco, CA), July .Newport Corporation, a worldwide leader in advanced motion control solutions, introduces the industry's premier line of highperformance air bearing stages specifically designed for the mm semiconductor wafer initiative.. For more information, please stop by Newport's South Hall booth # for a demonstration, or visit our website for sales contact information in your region.

Newport's innovative solutions leverage its expertise in highpower semiconductor, solidstate and ultrafast lasers, photonics instrumentation, submicron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers' manufacturing, engineering and research applications. A lowprofile monolithic stage architecture with integrated pressurevacuum air bearings provides unsurpassed stepping and scanning performance. Newport is part of the Standard & Poor's SmallCap Index and the Russell Index. The new DynamYX® DatumTM and GT are based on Newport's proven DynamYX series wafer processing and inspection platforms with more than , worldwide installations